Student research opportunities
Measurement of sample doping using electron microscopy
Project Code: CECS_858
This project is available at the following levels:
Engn R&D, Masters
Keywords:
Semiconductors, Electron Microscopy, Solar Cells, Laser processing
Supervisor:
Dr Klaus WeberOutline:
Laser doping of solar cells is a promising process for future solar cells. This process results in localised, heaily doped regions, Measuring the dopant densities in these regions with sub micron accuracy is extremely helpful in process development, but is challenging to do.
This project will seek to further develop an electron microscopy based technique to dopant density measurement. In secondary electron microscopy, under the right conditions a contrast is observed between differently doped regions. Correlating the observed contrast to the dopant concentration requires a careful investigation of images under various measurement conditions and comparison with calibrated samples.
Goals of this project
Determination of empirical relationships relating the image contrast to the dopant concentration for a set of measurement conditions
Determination of the accuracy of the technique and the main factors limiting its accuracy
Application of the technique to laser doped samples to measure dopant density distributions
Requirements/Prerequisites
ENGN3334 Semiconductors
Project is mainly suited for later year R&D students (preferably 18 unit project)
Student Gain
Expertise in secondary electron microscopy; theoretical understanding of SEM and solar cells; expertise with other measurement techniques; possibility of conf or journal publication
Background Literature
Available to interested students
